Removing of Nano-particles from Semiconductor Wastewater Using a Hybrid Treatment System
Packaging process is one of the main manufacturing steps in the wafer fabrication industries.However,nano-particles would be produced during the packaging process.The produced nano-particle-contained wastewater has characteristics of dark color and high turbidity.Because the nano-particles would usually result in the clogging of the membrane filtration system when it is used for water treatment and reclamation,the application of a pre-treatment system is required to extend the membrane life.The objective of this study was to develop a pre-treatment system for packaging wastewater treatment before membrane system was applied for further water quality improvement.In this laboratory-scale study,a hybrid treatment system containing a chemical coagulation/flocculation followed by ultra-filtration (UF) membrane technology was developed for the wafer fabrication wastewater treatment.The chemical coagulation/flocculation unit was used as the pre-treatment process to improve the efficiency of the following ultra-filtration (UF) membrane system.The packaging wastewater was collected from a wafer fabrication factory and used to evaluate the feasibility of the coagulation/flocculation process on nano-scale particle removal.Results show that approximately 98% of turbidity could be removed at pH 7 when 2.2 mg/L of polyaluminum chloride (PAC) (used as coagulant) and 0.5 mg/L of polyacrylamide (cPAM) (used as flocculant) were added during the coagulation/flocculation process.Results indicate that the coagulation/flocculation is a feasible pre-treatment process for nano-particle removal before UF membrane is applied for further water purification.Results from this study will be helpful in designing a scale-up system for practical applications.
chemical treatment membrane nano-particle ultra-filtration water purification
B.M.Yang C.M.Kao W.P.Sung C.P.Yang T.Y.Chen
Institute of Environmental Engineering, National Sun Yat-Sen University,Kaohsiung, Taiwan Department of Landscape Architecture, National Chin-Yi University of Technology,Taichung, Taiwan Center for Teaching Excellence, National Pingtung University of Science & Technology,Pingtung, Taiwa
国际会议
香港
英文
71-74
2012-07-26（万方平台首次上网日期，不代表论文的发表时间）