Theoretical Analysis of Chemisorption-induced Surface Stress

摘要：

　　Atomic/molecular adsorption on a microcantilever surface can cause the cantilever to deflect as a result of the adsorption-induced surface stress.In this paper,based on atomic/molecular interactions,an energy-based model is proposed to calculate the chemisorption-induced surface stress.The connection between the chemisorption-induced surface stress and the covalent bond interactions is established.The results are consistent with relevant experimental observations.This study is helpful for characterizing and optimizing the mechanical response of cantilever-based sensors.

关键词： Microcantilever Chemisorption Covalent interaction Relaxation Surface stress

作者: Jiqiao Zhang Xiqiao Feng Ganyun Huang Shouwen Yu

作者单位: Faculty of Civil and Transportation Engineering, Guangdong University of Technology, Guangzhou 51000 AML, Department of Engineering Mechanics, Tsinghua University, Beijing 100084, China Department of Mechanics, Tianjin University, Tianjin 300072, China

会议类型: 国际会议

会议名称: the 2012 International Conference on Frontiers of Nanoscience and Technology(2012年纳米科学与技术国际会议(ICFNST 2012))

会议地点: 香港

会议语种:英文

页码: 229-232

在线出版日期: 2012-07-26（万方平台首次上网日期，不代表论文的发表时间）