Numerical and experimental study on fabrication of microstructure array with topographical gradient via through-mask EMM
To obtain textured surface with low friction and high fluid load support capacity,in this work,based on the basic tenet of fluid film lubrication theory that converging gap is the first necessary condition to generate a hydrodynamic pressure in a confined fluid film,a fabrication method via through-mask electrochemical micromachining (EMM) for microstructure array on metal substrate with topographical gradient in a single micromachining step is investigated.After analyzing the factors that influence the current density distribution on the anode surface in EMM process,three potentially feasible schemes are presented and their fabrication results are predicted through numerical simulation.Combining the simulation results with practical application requirements,the scheme with machining gap gradient is adopted.With the selected fabrication scheme,the experiments are performed and the microstructure array with a feature size of 25/μm and a height variance from 12μm to 24tm within 2mm distance has been produced successfully,which is in good agreement with the numerical calculation prediction.
Through-mask electrochemical micromachining Topographical gradient Microstructure array Numerical simulation
Quandai Wang Jiming Xiao Yanjun Lü
School of Mechanical and Precision Instrument Engineering, Xi,an University of Technology, Xian,Peo School of Mechanical and Precision Instrument Engineering, Xi,an University of Technology, Xian,Peo
国际会议
香港
英文
254-258
2012-07-26（万方平台首次上网日期，不代表论文的发表时间）