会议专题

Implantation-induced structural defects in highly activated USJs:Boron precipitation and trapping in pre-amorphised silicon

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　　Today,most of the state-of-the-art USJs fabrication processes involve the formation of an amorphous surface layer before or during the dopant implant step.In this paper,we present a review of some recent experimental studies on the Boron precipitation and trapping in pre-amorphised USJs.These studies suggest that the physical mechanism governing the Boron trapping mainly depends on the Boron concentration left below the a/c interface after the implant.In addition to providing a contribution to the understanding of the Boron trapping phenomenon,these results clearly indicate that physical models for the formation of large Boron precipitates need to be implemented in TCAD simulators for a comprehensive description of the USJ fabrication process.

F.Cristlano D.Blavette D.Mangelinck P.F.Fazzini M.Quillec M.Bazizi M.Hackenberg S.Boninelli Z.Essa Y.Qiu Y.Spiegel F.Torregrosa J.Duchaine P.Boulenc C.Tavernier O.Cojocaru

CNRS-LAAS, Univ.of Toulouse, 7 av.du Col.Roche, 31400 Toulouse France Univ de Rouen, GPM, UMR CNRS 6634 BP 12, Av de lUniversité 76801 Saint Etienne de Rouvray, France Université Paul Cézanne, IM2NP-UMR 6242 CNRS Case 142, 13397 Marseille France LPCNO-INSA, 135, avenue de Rangueil, F-31077 Toulouse, France Probion, 37 rue de Fontenay, 92220 Bagneux, France Globalfoundries, Wilschdorfer Landstrasse 101, 01109 Dresden, Germany FhG-IISB, Schottkystrasse 10, 91058 Erlangen, Germany MATIS-IMM-CNR, Via Santa Sofia 64, 1-95123 Catania, Italy CNRS-LAAS, Univ.of Toulouse, 7 av.du Col.Roche, 31400 Toulouse France ;STMicroelectronics 850 rue J. CNRS-LAAS, Univ.of Toulouse, 7 av.du Col.Roche, 31400 Toulouse France ; CEMES-CNRS, 29 rue J.Marvig IBS av.G.Imbert 13790 Peynier Rousset France STMicroelectronics 850 rue J.Monnet F-38926 Crolles France Max-Planck-Institut für Eisenforschung, Max-Planck-Str.1, 40237 Düsseldorf, Germany

国际会议

2012 12th International Workshop on Junction Technology (2012结技术国际研讨会(IWJT-2012))

上海

英文

131-137

2012-05-10（万方平台首次上网日期，不代表论文的发表时间）