Non-Parametric Error Analysis of Specific Contact Resistance Measurement

摘要：

　　In this work,for the first time,an array of measured device data and a non-parametric (Bootstrapping) statistical analysis are used to estimate error bars for specific contact resistivity (Pc) using Scotts transmission line method (TLM).We conclude that the Scotts TLM results in a small error bar of less than ±1% (Tolerance Interval) for well-controlled patterning process that produces variability in critical dimension of less than 10nm.

作者: Khaled Ahmed

作者单位: Applied Materials, Inc., 3050 Bowers Avenue, Santa Clam, Califomia, USA

会议类型: 国际会议

会议名称: 2012 12th International Workshop on Junction Technology (2012结技术国际研讨会(IWJT-2012))

会议地点: 上海

会议语种:英文

页码: 184-185

在线出版日期: 2012-05-10（万方平台首次上网日期，不代表论文的发表时间）