Study on Integral Summation Algorithm for Measurement of Superfine Scale Based on Fraunhofer Diffraction

摘要：

　　The paper introduces a new method,integral summation algorithm,to measure superfine scale based on Fraunhofer Diffraction.Be different from the traditional method,the paper simulates a series of curve of diffraction luminance distribution on different given size based on Fraunhofer Diffraction theory and researches the closest one to the diffraction curve of unknown slot measured.In order to get more accurate measurement result,the curve is taken by the integral summation algorithm and be compared on the integration area difference instead of comparing the standard deviation.The result shows that the size of given slot is closer to the size of unknown slot than standard deviation method,which somewhat improves the accuracy of the measurement.

关键词： Integral Summation Algorithm Measurement Superfine Scale Fraunhofer Diffraction

作者: Liu chenxi Jin wei Ye ding

作者单位: Institute of Intelligent Measurement and Control, Northeastern University at Qinhuangdao,Qinhuangdao, China 066004

会议类型: 国际会议

会议名称: 2012 International Symposium on Polymer Composites and Polymer Testing(ISPCPT2012)(2012高分子复合材料与测试学术研讨会)

会议地点: 杭州

会议语种:英文

页码: 478-481

在线出版日期: 2012-03-23（万方平台首次上网日期，不代表论文的发表时间）