A fast Calibration Method of Optical Microscopes
High precision calibration is a key procedure to ensure image measurement system has accuracy measurement results.In the micro-domain applications,such as IC packaging,optical microscopes form a critical component.Although many calibration techniques exist for macroscopic camera-lens system,there is a dearth of literature on optical microscope calibration.Optical microscope calibration has unique characteristics that are quite different from normal camera calibration,including (1) unique calibration parameters; (2) calibration patterns that must be parallel to the image plane,and (3) restriction to single-plane calibration.In this paper,a fast calibration method based on linear relations between the digital image coordinate system and the calibration sample coordinate system is proposed for optical microscopes.We select 2-D dot array calibration plate which where etched on a glass plate as calibration sample.Experiments have been performed and calibration errors have been analyzed.
calibration image measurement optical microscope
Pan Jianjun Niu Yanzhao Xing Yanjing
School of information and communication engineering School of instrument science and photoelectronic engineering Beijing information science and technol
国际会议
2012 IEEE 11th International Conference on Signal Processing (第11届IEEE信号处理国际会议)
北京
英文
943-946
2012-10-21（万方平台首次上网日期，不代表论文的发表时间）