Deflection and Resonance Frequency Shift of a Microcantilever Induced by Chemisorption:Oxygen on Si(100)

摘要：

　　An energy-based model is presented to predict the deflection and resonance frequency shift of a microcantilever induced by chemisorption.The chemisorption of oxygen on Si(100) surface is taken as a representative example.The connection between the continuum-level cantilever responses (e.g.static deflection,resonance frequency) and the molecular-level interactions (covalent bond interactions) are established.The mechanical behavior of the cantilever on the density of adsorbed atoms/molecules and the property of the substrate is investigated.This study is helpful for designing microcantilever-based sensors which have many technologically important applications.

关键词： Microcantilever Chemisorption Deflection Resonance frequency Surface elasticity

作者: Jiqiao Zhang Ganyun Huang Xiqiao Feng Shouwen Yu

作者单位: Faculty of Civil and Transportation Engineering,Guangdong University of Technology,Guangzhou 510006, Department of Mechanics,School of Mechanical Engineering,Tianjin University,Tianjin 300072,China AML,Department of Engineering Mechanics,Tsinghua University,Beijing 100084,China

会议类型: 国际会议

会议名称: the 2012 2nd International Conference on Frontiers of Manufacturing Science and Measuring Technology (第二届制造科学与检测技术国际会议(ICFMM 2012))

会议地点: 西安

会议语种:英文

页码: 455-458

在线出版日期: 2012-06-12（万方平台首次上网日期，不代表论文的发表时间）