Multi-fields simulation model for micro-machined capacitive accelerometer
(0) To cope with the multi-physics fields simulation in MEMS device,based on PSPICE software,a multi-fields simulation model of capacitive micro-accelerometer is proposed,in which the mechanics,thermal and electric fields are included.Through the comparison of maximum step and pulse acceleration response under large displacement condition,which are obtained by simulation model and classic formula respectively,it is indicated that the difference between them is less than 3%.Furthermore,the comparison has been done with sensitivity test results in open loop mode.The comparison results show that the difference is less than 5% for large displacement situation and 3% for little displacement situation.Hence,the model could basically accomplish multi-physics fields simulation in MEMS device and be helpful in further research.
MEMS mechanics field thermal field electric field multi-fields simulation model
Dai Qiang Xu Bin Yu Jiaxin Jiang Gang Song Danlu Cai Yong
Tianjin Key Laboratory of Equipment Design and Manufacturing Technology,Tianjin University,Tianjin 300072,China
国际会议
西安
英文
842-846
2012-06-12（万方平台首次上网日期，不代表论文的发表时间）