Realization of Miniature Air Data System Based on Silicon Micro Pressure Sensor

摘要：

　　In this paper,miniature air data system is designed based on thermally excited resonant silicon micro structural pressure sensor.The system employs thermally excited resonant silicon micro structural pressure sensor for the pressure measurement.Using miniature embedded computer,calculation of the parameters such as height,airspeed and mach number and real-time display by LCD are realized.The volume and weight of this system is only one-twelfth of the original.In addition,it has the characteristics of high accuracy,high resolution,high stability and repeatability.

关键词： Silicon Micro Pressure Sensor Miniature Air Data System

作者: Limin Chang Xiangbin Yu Lijing Zhang

作者单位: Aviation University of Air Force,ChangChun,China 130022

会议类型: 国际会议

会议名称: the 2012 2nd International Conference on Frontiers of Manufacturing Science and Measuring Technology (第二届制造科学与检测技术国际会议(ICFMM 2012))

会议地点: 西安

会议语种:英文

页码: 1445-1449

在线出版日期: 2012-06-12（万方平台首次上网日期，不代表论文的发表时间）