Study on the stability of alkaline silica sol
The stability of slurry has a great effect upon the stability of polishing quality.At present the slurry of CMP includes SiO2 is applied in different fields respectively.But silicon sol is not enough to meet the requirement of CMP because of its instability.So the stability of silica sol is studied in this paper.It is known that the rate of coagulation depends mainly on the stability of the colloidal particles and that the solution pH and potential are the main factors affecting the colloidal stability.The stability of dispersion (the ability of the dispersion to resist coagulation) may be related to its kinetic stability,which in turn depends on the force barrier preventing collision between the particles and thus preventing their coagulation.The addition of surfactant can change the pH and the potential of silica sol.So o-20,JFC and PEG are selected to improve the stability of silica sol.The results presented here show that surfactant,PEG with low molecular weight,has a strong consequence on the stability of silica dispersion.
silica sol stability o-20 JFC PEG
Wang Juan Huang Yan Yan Wang Ru Sun ming Liu Yu Ling
Institute of Microelectronics, Hebei University of Technology, Tianjin, 300130,China
国际会议
厦门
英文
764-767
2012-01-04（万方平台首次上网日期，不代表论文的发表时间）