A Micro Triggered Spark Gap Switch with Three Electrodes

摘要：

　　A planar micro triggered spark gap switch with three electrodes was designed and fabricated based on non-silicon surface micromachining technology.It consists of two main electrodes,the shape of which is semicircle,and a triggering electrode which is a thin strip.The gap distance between two main electrodes is 800μm.Benefitting from MEMS technology,the switch is integratable and its cost has the potential to be reduced.The designed switch has been optimized and tested.It gives out a pulse current with peak of 5165.21A and 129.6ns rise time.The test data has an agreement with the simulation results.

关键词： spark gap switch breakdown voltage gas discharge surface micromachining

作者: Hui Shen Guifu Ding Zhenwei Zhou Zhuoqing Yang Xuemei Cui

作者单位: Shanghai Jiao Tong University Research Institute of Micro/Nano Science and Technology,Shanghai,China

会议类型: 国际会议

会议名称: the international conference on Frontier of Nanoscience and Technology (2011纳米科学与技术国际会议(ICFNST 2011))

会议地点: 大理

会议语种:英文

页码: 485-489

在线出版日期: 2011-08-18（万方平台首次上网日期，不代表论文的发表时间）