The study of a MEMS magnetic field sensor based on cross-shape ferromagnetic film

摘要：

　　Novel magnetic field sensors are based on a cross-shape ferromagnetic film (FMF) attached to a silicon diaphragm and piezoresistive membrane.The interaction between the magnetic field and the (FMF) generates a deflection of the diaphragm,which changes the piezoresistance and unbalances a Wheatstone bridge.The effect of FMF and silicon diaphragm thickness on the sensor performance is studied by the finite element simulation.The performance of sensor can be improved by optimizing the size of cross-shape FMF.These low-cost,low-power sensors are easily integrated with electronic circuits.

关键词： Magnetic field sensors cross-shape ferromagnetic film Ni finite element simulation

作者: Qibin Lin Guangtao Du

作者单位: School of Information Science and Technology,Southwest Jiaotong University,Chengdu,Peoples Republic School of Information Science and Technology,Southwest Jiaotong University,Chengdu,Peoples Republic

会议类型: 国际会议

会议名称: the international conference on Frontier of Nanoscience and Technology (2011纳米科学与技术国际会议(ICFNST 2011))

会议地点: 大理

会议语种:英文

页码: 523-527

在线出版日期: 2011-08-18（万方平台首次上网日期，不代表论文的发表时间）