Design and fabrication of low-power planar type gas sensor

摘要：

　　In this paper we describe the fabrication steps and the implementation of a planar type gas sensing applications with suspended structure,which presents very low power consumption.Simulations with the finite element model tool show homogeneous temperature distribution across the sensitive film.The device attached with a spin-coated thin layer of SnO2 showed a reasonable sensing performance to hydrogen.

关键词： Gas sensor Planar type Suspended structure Temperature distribution Power Consumption

作者: Zili Zhang Chenbo Yin Chunmin Tao Bin Zhu

作者单位: School of mechanical and power engineering,Nanjing University of Technology,Nanjing,Jiangsu,210009,China

会议类型: 国际会议

会议名称: the international conference on Frontier of Nanoscience and Technology (2011纳米科学与技术国际会议(ICFNST 2011))

会议地点: 大理

会议语种:英文

页码: 580-584

在线出版日期: 2011-08-18（万方平台首次上网日期，不代表论文的发表时间）