Lengthwise Detection of High Linearity Micromachined Gyroscope

摘要：

　　This paper introduces the basic working principle of capacitive micromachined gyroscope.A novel differential lengthwise capacitance comb detection structure is put forward.And it also analyzes the linearity of the differential lengthwise capacitive comb detection structure compares to the transversal detection.By measuring the scale factor,it verifies the high linearity of lengthwise differential capacitive detection structure.The linearity insures the linearity of conversing section of the detect systems displacement and the capacitive variation.And this will greatly improve the linearity and stability of micromachined gyroscope.

关键词： micromachined gyroscope lengthwise detection linearity

作者: Fenglin Yao Shiqiao Gao Xinjian Liang

作者单位: School of Mechatronical Engineering, Beijing Institute of Technology,5 South Zhongguancun Street,Hai School of Mechatronical Engineering, Beijing Institute of Technology,5 South Zhongguancun Street,Hai China Aerospace Science and Technology Corporation

会议类型: 国际会议

会议名称: the 2011 International Conference on Frontiers of Manufacturing Science and Measuring Technology (第一届制造科学与检测技术国际会议(ICFMM2011))

会议地点: 重庆

会议语种:英文

页码: 529-533

在线出版日期: 2011-06-23（万方平台首次上网日期，不代表论文的发表时间）