An Experimental Study of Atomization Characteristics of the Ultrasonic Spray Nozzle
The recent development in advanced packaging and MEMS applications has created a need for high aspect ratio lithography processes,ultrasonic spray coating is a very appropriate method to meet this requirement,the parameters of atomization are greatly affected the spray quality.By using a laser-phase Doppler analyzer (PDA),an experimental study was conducted of the atomization characteristics of the ultrasonic spray nozzle,water was used as the liquid to be atomized instead of photoresist and air was used as the auxiliary gas instead of nitrogen,the parameters of atomization characteristics under different operating conditions were measured,such as mean diameter D10 and diameter distribution of atomized droplet particles etc.The experimental measurement results indicate that the flow rate of atomized liquid and auxiliary gas have a significant impact on the spray characteristics,the nozzle can achieve a comparatively good atomization state under the condition of a relatively small flow rate of atomized liquid or a relatively high flow rate of auxiliary gas,the mean diameter D10 of droplets can be 18.39tm.The research findings can provide an underlying basis for the application of the ultrasonic spray nozzle.
Ultrasonic spray nozzle PDA Atomization characteristics
Degang Qu Dong Xiang Leiming He Guanghong Duan Peng Mou
Department of Precision Instruments and Mechanology, Tsinghua University, China, 100084 ;Department Department of Precision Instruments and Mechanology, Tsinghua University, China, 100084
国际会议
重庆
英文
958-963
2011-06-23（万方平台首次上网日期，不代表论文的发表时间）