Mini-Nano-Displacement Measurement with Double Diffraction Grating
Based on Doppler and Fourier optics analysis method,analyzed the configuration of double diffraction grating,and built its non-contact optical measurement mathematic model.And built double diffraction grating interference displacement measurement system,the design of double diffraction light path can compensate the deflection angle of grating moving,greatly improved tolerance of gratings deflection.The compact and micro configuration of its light path,shorten optical distance,improving systems environment anti-interference ability.Experimental resulting show,within 20nm displacement measurement,and<50mm/sec measurement speed,the system resolution is lnm and measurement precision is less than 30nm.
Nano-measurement double diffraction Grating interference
Minlan Jiang Fupeng Li Xiaodong Wang
Zhejiang Normal Univ., Jinhua 321004,China
国际会议
重庆
英文
1159-1163
2011-06-23(万方平台首次上网日期,不代表论文的发表时间)