Mini-Nano-Displacement Measurement with Double Diffraction Grating

摘要：

　　Based on Doppler and Fourier optics analysis method,analyzed the configuration of double diffraction grating,and built its non-contact optical measurement mathematic model.And built double diffraction grating interference displacement measurement system,the design of double diffraction light path can compensate the deflection angle of grating moving,greatly improved tolerance of gratings deflection.The compact and micro configuration of its light path,shorten optical distance,improving systems environment anti-interference ability.Experimental resulting show,within 20nm displacement measurement,and<50mm/sec measurement speed,the system resolution is lnm and measurement precision is less than 30nm.

关键词： Nano-measurement double diffraction Grating interference

作者: Minlan Jiang Fupeng Li Xiaodong Wang

作者单位: Zhejiang Normal Univ., Jinhua 321004,China

会议类型: 国际会议

会议名称: the 2011 International Conference on Frontiers of Manufacturing Science and Measuring Technology (第一届制造科学与检测技术国际会议(ICFMM2011))

会议地点: 重庆

会议语种:英文

页码: 1159-1163

在线出版日期: 2011-06-23（万方平台首次上网日期，不代表论文的发表时间）