Thermoelastic damping in microbeam resonators with a proof mass

摘要：

　　Predicting thermoelastic damping is crucial for the design of high Q MEMS devices.In thepast,for the thermoelastic damping in microbeam resonators,Zeners model (1937 Physical Review 52 230-5; 1938 Physical Review 53 90-9) and Lifshitz and Roukes model (2000 Physical Review B 61 5600-9) can give a reasonable prediction.However,the derivations of Zeners model and Lifshitz and Roukes model are only suitable for a simple beam with no proof mass.The microbeam with a proof mass is a common element in many MEMS devices.In this paper,a general proof is presented that shows LRs model is also valid for the TED in the microbeams with a proof mass.The derivation in this paper is based on a general case.

关键词： MEMS microresonator thermoelastic damping quality factor

作者: Rufu Hu Yanning Deng Pu Li

作者单位: Department of Mechanical Engineering, Ningbo University of Technology, Ningbo, China School of Mechanical Engineering, Southeast University, Nanjing, China

会议类型: 国际会议

会议名称: the 2011 International Conference on Frontiers of Manufacturing Science and Measuring Technology (第一届制造科学与检测技术国际会议(ICFMM2011))

会议地点: 重庆

会议语种:英文

页码: 1185-1189

在线出版日期: 2011-06-23（万方平台首次上网日期，不代表论文的发表时间）