Overview Design Method of MEMS Devices System

摘要：

　　With the development of MEMS devices,the design requirements to MEMS devices are more and more high.Computer Aided design of MEMS devices have been from the simple structure,fabrication process design to the development of the system design.The corresponding design pattern originally used to be to function and performance,which is called Bottom-Up,is developing to such a pattem named Top-Down to meet demands as the final purpose,and it is more reasonable.According to the current situation of MEMS technology,this paper presents a timely system design method of micro devices based on Top-Down,and further discuss the design process of Top-Down of micro devices.

关键词： Design Mode System Level Simulation Macro-model Field-coupling

作者: Huan Zhang Chao Chen Tao Wang Shu Min Ma Ya Nan Deng Hong Xi Zhou

作者单位: State Key Laboratory of Electronic Thin Films and Integrated Devices,University of Electronic Science and Technology of China,Chengdu Sichuan 610054,China

会议类型: 国际会议

会议名称: the 2012 International Conference on Manufacturing Engineering and Automation (2012年制造工程与自动化国际会议(ICMEA2012))

会议地点: 广州

会议语种:英文

页码: 63-66

在线出版日期: 2012-11-16（万方平台首次上网日期，不代表论文的发表时间）