Design and Pspice Simulation on Interface Circuit of Capacitive micro-gyroscope
For testing angle velocity,testing system of micromechanical gyroscope is applied widely in both military and civil areas,and it is provided with broad foreground of evolution and application,The characteristics of the application require them have high sensitivity and accuracy,under this conditions,technology development level of interface circuit reach their limits,and restricts test performance improvement of the system of micro-gyroscope.In this paper the equivalent electrical model of capacitive micro-gyroscope is established firstly,then a novel interface circuit is designed,the interface circuit include two part,driving-circuit and detecting-circuit,and the feasibility of the driving-circuit and detecting-circuit is emulated and validated by Pspice respectively.The detecting circuit of static state capacitance is come true,and theoretical accuracy of it is 10-l8F.
Micro-gyroscope Quivalent Electrical Model Self-excited Driving
Yunbo Shi Xingjuan Zhao Jun Liu
Science and Technology on Electronic Test &Measurement Laboratory,north university of china,Taiyuan,shanxi,030051,china
国际会议
广州
英文
284-287
2012-11-16（万方平台首次上网日期，不代表论文的发表时间）