Laser Drilling on Elastomeric Polymers
Elastomeric polymers have been used as moulds for fabricating micro structures in the soft lithography technology due to their elastic features and unstickiness to polymer features.Previously,the micro moulds were normally produced by imprinting on micro prototypes,which are fabricated using deep reactive etching or photolithography.In this paper,we introduce a direct mould fabrication method,which uses pulsed laser drilling technology to directly generate high aspect ratio patterns in elastomeric polymers.The effects of laser parameters such as pulse repetition rate and average power on the drilling qualities are systematically studied.The techniques presented in this paper would provide a more flexible way to fabricate high aspect ratio micro features on elastomer mould efficiently.
Micro Mould Elastomer Pico Second Laser Helical Drilling
Chun Lei Kang Yan XU Kai Leung Yung Wei Chen Hang Liu
Dept.of Industrial & Systems Engineering,The Hong Kong Polytechnic University,Hung Hom,Kowloon,Hong Kong SAR
国际会议
广州
英文
307-310
2012-11-16（万方平台首次上网日期，不代表论文的发表时间）