The Experiments Study of Polishing Characteristics during Polishing Process
The investigation of experiment becomes more important to increase the understanding of polishing performance.In this paper,a high precision polishing process test bench with in-situ measurement technology was applied to investigate the effects of operating parameters on polishing interfacial phenomena during mechanical polishing with IC1000 pad.The shear force and temperature rise were measured for stainless steel during mechanical polishing process.The surface temperature was measured by T-type thermocouples and the shear force was measured by a load transducer.The shear force for various particle size,applied load and rotation speeds during polishing process was demonstrated.Furthermore,the temperature rise under different slurry concentration was investigated.The experimental results contribute to the understanding of polishing mechanism and also provide an index to end-point-detection.
Chemical-Mechanical Polishing Slurry Concentration Temperature Rise Shear Force
Hung-Jung Tsai Hung-Cheng Tsai Pay-Yau Huang Jeng-Haur Horng Shun-Jung Chiu
Department of Mechanical Engineering,WuFeng University,Chia-Yi 621,Taiwan Graduate Institute of Industrial Design,National Kaohsiung First University of Science and Technolog National Formosa University,Huwei,Yunlin 632,Taiwan
国际会议
广州
英文
460-463
2012-11-16（万方平台首次上网日期，不代表论文的发表时间）