Active scalable elastomer mold to ease demolding of high aspect ratio micro features

摘要：

　　To fabricate high aspect ratio micro/nano features,demolding is more challenging than filling of melt into micro mold as solidified micro features can be easily peeled off when demolding resistance is high.Besides using anti-stick agent,using deformable mold is a new solution proposed by the authors.This paper presents a setup for testing the deformable active mold.Experimental results on micro thermal molding with the developed mold deforming system prove that the new system can successfully demold high aspect ratio micro features that cannot be produced with traditional metal mold.

关键词： Active Mold Elastomer Mold Shape Memory Driven High Aspect Ratio Microfeature

作者: Yan Xu Kai-Leung Yung Hang Liu

作者单位: Dept.of Industrial & Systems Engineering,The Hong Kong Polytechnic University,Hung Hom,Kowloon,Hong Kong SAR

会议类型: 国际会议

会议名称: the 2012 International Conference on Manufacturing Engineering and Automation (2012年制造工程与自动化国际会议(ICMEA2012))

会议地点: 广州

会议语种:英文

页码: 880-883

在线出版日期: 2012-11-16（万方平台首次上网日期，不代表论文的发表时间）