Spectral-domain Optical Coherence Tomography for Material Detection
Optical coherence tomography is a non-invasive cross-sectional imaging technology for inhomogeneous samples.Spectral-domain optical coherence tomography is introduced to measure film and Silicon dovetail groove in this paper.A novel method is used to deal with the interference spectrum to improve the quality of the two-dimensional cross-sectional image.The experimental result shows the microstructure of the two samples can be clearly seen as expected.From the visualized two-dimensional cross-sectional imaging,the film thickness and the dimension of the Silicon dovetail groove are obtained with this technique.It is experimentally demonstrated that this system is useful for imaging the microstructure of the internal and surface of film and semiconductor.It can be further developed for other material detection in industrial fields.
Optical coherence tomography Measure Cross-sectional image
Yu Wei Qin Hong Zhao
State Key Laboratory for Manufacturing Systems Engineering,Xian Jiaotong University,Xian,710049,Ch State Key Laboratory for Manufacturing Systems Engineering,Xian Jiaotong University,Xian,710049,Ch
国际会议
广州
英文
1139-1142
2012-11-16（万方平台首次上网日期，不代表论文的发表时间）