The Thermal Conductance Estimation of Uncooled Microbolometer

摘要：

　　Thermal conductance of microbolometer has a directly impact on Noise Equivalent Temperature Difference (NETD) and thermal time constant which are the key indicators of uncooled IR detector.It is of great significance to calculate and evaluate thermal conductance.A calculate approach of thermal conductance for uncooled microbolometer detectors is introduced in this paper.Accurate three-dimensional modeling of microbolometer is found by using MEMS analysis software Intellisuite.Dynamic thermal analysis of this model is solved and then thermal time constant can be read from thermal time curve of the analysis mentioned above.Combined with the calculation of thermal capacitance,more precisely thermal conductance value can be reached which is more accurate than theoretical calculations result and meaningful for design and fabrication of the device.

关键词： Thermal conductance Uncooled microbolometer Thermal time constant

作者: Chao Chen Ya Dong Jiang Hong Xi Zhou

作者单位: State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu Sichuan 610054, China

会议类型: 国际会议

会议名称: the 2012 International Conference on Materials Science and Nanotechnology (2012年材料科学与纳米技术国际会议(ICMSN 2012))

会议地点: 广州

会议语种:英文

页码: 477-480

在线出版日期: 2012-11-16（万方平台首次上网日期，不代表论文的发表时间）