Study on Parameters of MEMS Accelerometer

摘要：

　　An accelerometer is a micro-electromechanical device which can sensitive to acceleration.The sensing mechanism of accelerometer is that when accelerated,the mass moves in Z-axis,and the gap between parallel plates changed with the loads,which causes vary of the capacitance of the estimation.This paper presents a newly developed sensor for the conventional capacitive MEMS accelerometer in Z-axis.The principle of capacitive acceleration is based on the detection the change of capacitance which results from acceleration changes.The sensor is used for estimation of the size and loads variations for accelerometer.This paper has been focused on the design of the MEMS accelerometer and calculation of the major parameters of the sensor.

关键词： Capacitive Accelerometer Cantilever beam Mass Coefficient of elasticity Natural frequency Quality factor Damping ratio

作者: Shu Min Ma Chao Chen Tao Wang Huan Zhang Hong Xi Zhou

作者单位: State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu Sichuan 610054, China

会议类型: 国际会议

会议名称: the 2012 International Conference on Materials Science and Nanotechnology (2012年材料科学与纳米技术国际会议(ICMSN 2012))

会议地点: 广州

会议语种:英文

页码: 496-499

在线出版日期: 2012-11-16（万方平台首次上网日期，不代表论文的发表时间）