Characterization of Cr doped diamond-like carbon films and research on mechanical properties
Diamond-like carbon (DLC) films have been extensively studied for more than a decade due to their unique combination of properties.The internal compressive stress affects their adhesion and preventing wide usage of these films.Metal-containing DLC films are expected to relax internal stress.The present work focused on the synthesis,chemical bond and mechanical property characterization of Cr-containing DLC films.The films thickness,internal stress and composition were characterized by scanning electron microscopy,optical interferometry and X-ray photoelectron spectroscopy respectively.Incorporation of Cr into DLC causes an initial internal stress reduction and subsequent stabilization around 0.5 GPa.The hardness behavior was found to depend on Cr content.Films with less than 7.36 at.% Cr (no formation of C-Cr bond) showed a dramatically hardness reduction compared to pure DLC films.Above 7.36 at.% Cr (C-Cr bond formed) the hardness increases above 12 GPa.
Cr-DLC films Internal stress Nanohardness XPS
Youyu Fan Guang Li Yuan Xia
Institute of mechanics, Chinese Academy of Sciences, Beijing 100190, China; Graduate University of C Institute of mechanics, Chinese Academy of Sciences, Beijing 100190, China
国际会议
广州
英文
523-526
2012-11-16（万方平台首次上网日期，不代表论文的发表时间）