Research for Extraction Method of MEMS Devices Macro-model

摘要：

　　The purpose of extracting Macro-model of macro sensor is to find out the mathematical model representing system characteristics of behavior efficiently and accurately.A good understanding of the whole system,collaborative simulation with circuit and optimize system design are meaningful.Whether the extraction of device level Macro-model is truly effective ornot,it directly influences the simulation results of system level.Therefore,an effective extraction method of Macro-model is crucial to system simulation.Meanwhile,fast and effective extraction approach for MEMS devices Macro-model will continue to be the main future development of technology.This paper presents a fast automatic extraction technology for Macro-model.Coordinating physical level and system level is to meet the demands of system level fast modeling and simulation.

关键词： MEMS CAD System Level Simulation Macro-model Multi-physical Coordinated Simulation Analysis

作者: Huan Zhang Chao Chen Tao Wang Shu min Ma Hong xi Zhou Ya nan Deng

作者单位: State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu Sichuan 610054, China

会议类型: 国际会议

会议名称: the 2012 International Conference on Materials Science and Nanotechnology (2012年材料科学与纳米技术国际会议(ICMSN 2012))

会议地点: 广州

会议语种:英文

页码: 555-558

在线出版日期: 2012-11-16（万方平台首次上网日期，不代表论文的发表时间）