Optical properties of crystallized titanium oxide thin films prepared by sol-gel process
Titanium oxide thin films have been deposited by sol-gel dip-coating method.Crystallization of titanium oxide thin films were then achieved through thermal annealing at temperatures above 400 ℃.The stability of the synthesized sol was investigated by dynamic light scattering particle size analyzer.The structural properties and surface morphology of the crystallized films were studied by micro-Raman spectroscopy and atomic force microscopy,respectively.Characterization technique based on least-square fitting to the measured reflectance and transmittance spectra is used to determine the refractive indices of the crystallized TiO2 films.The influence of the thermal annealing on the optical properties was then discussed.The increase in refractive index with high temperature thermal annealing process was observed,obtaining refractive index values from 1.98to 2.57 at He-Ne laser wavelength of 633 nm.The Raman spectroscopy and atomic force microscopy studies indicate that the index variation is due to the crystalline phase,density,and morphology changes during thermal annealing.
Sol-gel TiO2 thin film refractive index
Xiaodong Wang Guangrning Wu Bin Zhou Jun Shen
Pohl Institute of Solid State Physics, Shanghai Key Laboratory of Special Artificial Microstructure Materials and Technology, Tongji University, Shanghai 200092, P.R.China
国际会议
上海
英文
130-130
2012-10-19（万方平台首次上网日期，不代表论文的发表时间）