Structure and Optical Properties of Al1-xScxN Thin Films

摘要：

　　In this study,c-axis oriented AlN and All-xScxN films have been successfully grown on Si (100) and quartz glass by DC magnetron reactive sputtering method.The XRD patterns show that the crystal structure of the All-xScxN films is (002) orientation.The grain size and band gap energy (Eg)of the Al1-xScxN films decrease as the Sc concentration increases.The frequency of the E2 (high)mode observed in the All-xScxN films shows higher red shift compared to that observed in AlN film and the peak shifts to the low wave number with the increasing of Sc concentration.

关键词： Thin film Scandium Aluminum Nitride Structure Optical property

作者: Jing Yang Miaomiao Cao Yudong Li Yigang Chen

作者单位: Department of Electronic Information Materials,School of Materials Science and Engineering,Shanghai University,149 Yanchang Road,Shanghai 200072,China

会议类型: 国际会议

会议名称: 2012 Workshop on Inorganic Thin Films and Coatings (2012年无机薄膜与涂层学术研讨会)

会议地点: 桂林

会议语种:英文

页码: 140-143

在线出版日期: 2012-07-16（万方平台首次上网日期，不代表论文的发表时间）