Preparation and Properties of ZnO/ZAO Double-Layers Thin Films on the Substrate of Glass

摘要：

　　Aluminium zinc oxide(ZAO) thin films were deposited on soda-lime-silica glass substrate by middle frequency power magnetron sputtering.Then zinc oxide (ZnO) thin films were deposited above ZAO thin films by electrochemical deposition method at different time.ZAO thin films and ZnO/ZAO double-layers thin films were characterized by X-ray diffraction (XRD) and scanning electron microscope (SEM).A four-point probe was used to determine the resistivity of the films.The optical transmittance of ZAO films and ZnO/ZAO films was measured by UV-visible spectrum.The results represent that the transmittance of ZAO/ZnO thin films decreases gradually with deposition time increasing.When the deposition time is 5 minutes,the maximum transmittance of ZnO/ZAO films reaches to 85% at wavelength from 400nm to 600nm,and the thickness and resistivity of thin film are 610nm and 2.04×10-3Ω·cm,respectively.However,the thickness and resistivity are highest when the deposition time is 20 minutes,which reaches to 808nm and 1.2x 10-2Ω·cm.Meanwhile,the lattice constants a and c of ZAO/ZnO thin films demonstrate an expansion with deposition time increasing.In essence,good-quality double-layers thin films of ZnO/ZAO play an important role in CIGS solar cells.

关键词： ZnO/ZAO double-layers thin film magnetron sputtering electrochemical deposition CIGS solar cells

作者: Guishan Liu Mingjun Wang Zhiqiang Hu Yanyan Jiang Xiaoyue Shen

作者单位: College of Physics Science & Technology,Shenzhen University,Shenzhen,P.R.China

会议类型: 国际会议

会议名称: 2012 Workshop on Inorganic Thin Films and Coatings (2012年无机薄膜与涂层学术研讨会)

会议地点: 桂林

会议语种:英文

页码: 150-154

在线出版日期: 2012-07-16（万方平台首次上网日期，不代表论文的发表时间）