Determination of Thickness of PZO Films Deposited on ITO Glass Substrates

摘要：

　　PZO (PbZrO3) coatings with different thicknesses were deposited onto Indium Tin Oxide ITO glass substrates at room temperature by magnetron sputtering technique.UV-Vis absorption spectra method and microhardness testing method were used to measure the thickness of coating.It was proved that the measuring results of film thickness by two kinds of methods were equivalent,and either one method can be alternatively used to determine the thickness of deposited films.

关键词： PbZrO3 film thickness UV-vis microhardness

作者: Xuejiao Li Cheng Zhanga Na Zhang

作者单位: School of Materials Science and Engineering,Shanghai Institute of Technology,Shanghai 200235,China

会议类型: 国际会议

会议名称: 2012 Workshop on Inorganic Thin Films and Coatings (2012年无机薄膜与涂层学术研讨会)

会议地点: 桂林

会议语种:英文

页码: 161-164

在线出版日期: 2012-07-16（万方平台首次上网日期，不代表论文的发表时间）