Analysis on the Detection Capacitance of Comb Micro-Machined Gyroscope

摘要：

　　The micro-machined gyroscope is a kind of typical micro-electro-mechanical sensor,its typical working mode is electrostatic drive and comb capacitive detection.As for as the transverse detection capacitance structure now commonly used,we find out that the relationship between capacitance variation and displacement is nonlinear through analyzing its detection capacitance.This nonlinearity will greatly affect the dynamic performance of micro-machined gyroscope.

关键词： comb capacitance micro-machined gyroscope detection capacitance nonlinearity

作者: Hai-peng LIU Shi-qiao GAO Lei JIN

作者单位: State Key Laboratory of Explosion Science and Technology, Beijing Institute of Technology, China School of Mechatronical Engineering, Beijing Institute of Technology, China

会议类型: 国际会议

会议名称: the Second International Conference on Frontiers of Manufacturing and Design Science(第二届制造与设计科学国际会议(ICFMD 2011))

会议地点: 台湾

会议语种:英文

页码: 33-37

在线出版日期: 2011-12-11（万方平台首次上网日期，不代表论文的发表时间）