Effect of catalytic time variation on Silica Antireflective Coatings

摘要：

　　Based on TEOS system and sol-gel process,together with catalysts,the microstructure of SiO2 particles in the sol is exactly controlled.The films are characterized by ellipsometer and SEM respectively.The experimental results show that adjusting catalytic time can effectively effect the uniformly porous structures of SiO2 thin film on the glass substrate.

关键词： Tetraethyl-orthosilicate Antireflective coating, Sol-gel, catalytic time

作者: Ruimin Jin Zhiduan Cai Limin Cang Tao Yan Xiangju Han

作者单位: Institute of Solar Cell Nanyang Institute of Technology, Henan 473004, China ;Postdoctoral workstati Postdoctoral workstation Ancai Hi-Tech Co., Ltd., Anyang 455000, China

会议类型: 国际会议

会议名称: the Second International Conference on Frontiers of Manufacturing and Design Science(第二届制造与设计科学国际会议(ICFMD 2011))

会议地点: 台湾

会议语种:英文

页码: 80-84

在线出版日期: 2011-12-11（万方平台首次上网日期，不代表论文的发表时间）