A More Effective Technique of Design Synthesis For MEMS with Expected Performance

摘要：

　　A design synthesis technique based on sensitivity for Micro-Electro-Mechanical Systems (MEMS) proposed.This new technique can be called Sensitivity-Based Direct Solution Algorithm (DSA) of design synthesis for MEMS with expected performance.Design synthesis with expected performance is regarded as a reverse problem of MEMS analysis.Behavior equation group can be educed from analysis equations.This behavior equation group can be solved using any solution algorithm of non-linear equation group.Newton Iteration Method based on sensitivity is adopted.Comparing with Genetic Optimization Algorithm (GA),computational workload of DSA is greatly decreased.

关键词： MEMS Design Synthesis Direct Solution Algorithm Genetic Algorithms Simulated Annealing comparing

作者: Shuxun Chen

作者单位: Department of Mechanical Engineering, Guangxi University, Nanning, Guangxi, China

会议类型: 国际会议

会议名称: the Second International Conference on Frontiers of Manufacturing and Design Science(第二届制造与设计科学国际会议(ICFMD 2011))

会议地点: 台湾

会议语种:英文

页码: 637-641

在线出版日期: 2011-12-11（万方平台首次上网日期，不代表论文的发表时间）