A New Type of Resonator Designed for Plasma Chemical Vapor Deposition
Plasma Chemical Vapor Deposition (PCVD) is an important application in making optical fiber core rod.The resonator is the key part for PCVD application.But the existing resonator have several serious disadvantages:its working is not stable; the size of deposited substrate tube is small((O)3 lmm); the deposition rate is low(2.5g/min) and the deposition effect is unsymmetrical; the fabrication of the resonator is very difficult and expensive.Therefore,a new type of resonator,a cylinder resonator,is designed to overcome the above disadvantages.The cylinder resonator supports bigger substrate tube (Max (O)60mm) and higher deposition rate(3.2g/min) than existing ones,while its working is also more stable.Since the structure is more simple,the fabrication is easier and cheaper.The corresponding microwave theoretical method of the new resonator designing is also introduced with the necessary computer simulation,as well as test running.And TE111 mode microwave is the Fundamental Mode of the cylinder resonator.The cylinder resonator has been applied in normal production for 4 years,which is better for bigger size core rod making,improving the optical fiber quality and saving cost.It is estimated,after modification with the cylinder resonator and 10kW microwave generator,a PCVD lathe can yield 30% more rods than before.
Resonator Plasma Chemical Vapor Deposition (PCVD) Substrate Tube Deposition Rate Microwave
Zhenyu LI Hongsheng LI
School of Automation, Wuhan University of Technology, Wuhan 430070, China
国际会议
台湾
英文
642-646
2011-12-11（万方平台首次上网日期，不代表论文的发表时间）