MEMS/NEMS Nano Technology

摘要：

　　This book brings together over 153 peer-reviewed papers,grouped into 6 chapters:Micro-/Nano-Fabrication and Measurement Technologies,Micro-Sensors and Actuators,Microfluidic Devices and Systems,MEMS/NENS and Applications,Nano-Material Research / Nanotubes / Nanowire Devices,Micropower Technology,Theories in Micro-/Nano-Technologies.Most of the papers are authored by Chinese researchers,and the volume thus offers a good overview of the research on MEMS and nano-technology being conducted in China.The work will be of great interest to researchers,graduate students and engineers who are working in the fields of MEMS and nano-technology.

关键词： MEMS NEMS nanomaterials nanotechnolgy

作者: Ed.Xiaohao Wang

会议类型: 国际会议

会议名称: the Second International Conference on Frontiers of Manufacturing and Design Science(第二届制造与设计科学国际会议(ICFMD 2011))

会议地点: 台湾

会议语种:英文

页码: 841-841

在线出版日期: 2011-12-11（万方平台首次上网日期，不代表论文的发表时间）