Effects of Temperature and Humidity on the Optical Property of Aluminum Film

摘要：

　　Aluminum films with high reflectivity and low absorption in the visible wavelength region have been widely used in optical applications.In this investigation,aluminum films were deposited on the glass substrate at various temperatures by electron-beam vapor deposition.The reflectivity of the Al thin film was measured by a Perkin-Elmer Lambda spectrophotometer in the wavelength region of 450-680 nm.The effects of the temperature and humidity on the reflectivity of the Al film were examined.Experimental results show that the reflectivity of Al films is increasing with the increase of substrate temperature.

关键词： electron-beam vapor deposition aluminum film reflectivity humidity

作者: Shiuh-Chuan Her Yi-Hsiang Wang

作者单位: Dept.Of Mechanical Engineering, Yuan Ze University,135, Yuan-Tung Road, Chung-Li, 320, Taiwan

会议类型: 国际会议

会议名称: the Second International Conference on Frontiers of Manufacturing and Design Science(第二届制造与设计科学国际会议(ICFMD 2011))

会议地点: 台湾

会议语种:英文

页码: 3930-3934

在线出版日期: 2011-12-11（万方平台首次上网日期，不代表论文的发表时间）