Appling of New Optical Measurement and Theory in Mechanical Properties of Thin Film
The thesis aims to characterize the mechanical properties and stresses for thin films deposited on the circular substrates.First,the thin films with the same deposition condition were successively deposited on the distinct substrates using the evaporation technique.The phase-shifting Twyman-Green interferometer (PSTGI) was then employed to measure the warpage of the film-substrate structures and therefore the intrinsic stresses and thermal stresses can be calculated from the well-known Stoneys formula.The coefficients of thermal expansion (CTE) and Youngs modulus of thin films were also obtained from the Stoneys theory.Furthermore,the merit of full-field character of optical interferometry was used to propose a novel methodology using the Chen and Ous theory to improve the accuracy and to reduce the experiment procedures in the traditional measurement of the aforementioned mechanical properties.Finally,the measured results corresponding to the traditional and proposed methods were respectively substituted into their adopted theories to compare their difference.The results reveal that the accuracy of proposed methodology is considerably improved and the experimental procedures are reduced to those of the traditional methods.
coefficients of thermal expansion thermal stress Twyman-Green interferometer
Yun Hao-MA Lu Pin-Chao J.S.Hsu
Nation Taiwan University of science and technology, Taipei, 105, Taiwan Feng Chian University, Taichung, 407, Taiwan National formosa University, Yunlin, 632, Taiwan
国际会议
台湾
英文
4295-4299
2011-12-11（万方平台首次上网日期，不代表论文的发表时间）