Preparation of SrTiO3 Thin Films with Self-assembled Monolayers by Liquid Phase Deposition and Its Dielectric Properties

摘要：

　　Using (NH4)TiF6,Sr(NO3)2 and H3BO3 as raw materials,water as the solvent,and the as-prepared precursor solution with the molar ratio of (NH4)TiF6 ∶ Sr(NO3)2 ∶ H3BO3 =1 ∶ 1 ∶ 3,SrTiO3 thin films were fabricated on FTO substrate by the liquid phase self-assembly technique.The effects of the concentration and pH values of the as-prepared precursor solution on the dielectric properties of SrTiO3 thin films were studied.When the concentration of the precursor solution is 0.0125 mol/L,the pH value is 3.30,the deposition temperature is 50 ℃,the deposition time is 18 h and at 600 ℃ annealed for 2 h,SrTiO3 thin films with the pure phase is prepared on FTO glass substrate.The dielectric constant of SrTiO3 thin films is the maximum,1060 when the frequency is between 1 and 45 kHz.The dielectric loss is the minimum,3.781.The SrTiO3 thin films prepared by liquid phase self-assembly method has a certain dielectric property.

关键词： Self-assembled monolayers liquid phase deposition SrTiO3 thin film dielectric property

作者: Weiguang Han Guoqiang Tan Ao Xia Huijun Ren

作者单位: Key Laboratory of Auxiliary Chemistry & Technology for Chemical Industry,Ministry of Education,Shaanxi University of Science and Technology,Xian 710021,P.R.China

会议类型: 国际会议

会议名称: The Seventh China International Conference on High-Performance Ceramics (第七届先进陶瓷国际研讨会(CICC-7))

会议地点: 厦门

会议语种:英文

页码: 1165-1170

在线出版日期: 2011-11-04（万方平台首次上网日期，不代表论文的发表时间）