Piezoceramic Stack Actuators for Micropositioning Stage

摘要：

　　Based on piezoceramic stack actuators,a stage (dimension of 50 × 50 × 11 mm) with a symmetric displacement magnifying mechanism is studied in this paper.FEM simulations are carried out to reveal the performance of the micropositioning stage and the amplification radio of the flexure hinge of the stage is 4.76.The working mode of the flexure hinge is also simulated by finite element method,and its natural frequency is 3291Hz.A series of tests about piezoceramic stack actuators have been done,including static,dynamic and temperature tests.The experimental results are identical to the theoretical analysis and give help to the application of piezoceramic stack actuators.It can also help the precise micropositioning stage driven by PZT to achieve higher positioning accuracy and resolution.

关键词： Piezoceramic stack actuators Flexure hinge Micropositioning stage FEM

作者: Yanan Xu Xiangcheng Chu

作者单位: State Key Lab.of New Ceramics and Fine Processing,Tsinghua University,Beijing 100084,China

会议类型: 国际会议

会议名称: The Seventh China International Conference on High-Performance Ceramics (第七届先进陶瓷国际研讨会(CICC-7))

会议地点: 厦门

会议语种:英文

页码: 1337-1341

在线出版日期: 2011-11-04（万方平台首次上网日期，不代表论文的发表时间）