Magnetron Sputtering of Tantalum Oxide Thin Electrolyte Film for Electrochromic Applications
Electrochromism have been widely investigated due to their potential applications such as automobile and building window.In this study,tantalum oxide thin films used as ion conducting layer were deposited on WO3/ITO at room temperature by magnetron sputtering.The thickness of tantalum oxide films were varied to investigate their effects on composition,microstructure,optical properties,and electrochromic properties determined by X-ray diffraction,UV-visible spectrometer,Atomic force microscope (AFM),and field-emission scanning electron microscope (FE-SEM),respectively.Experimental results indicated Ta2O5 thin film with the thickness of 300 nm showed better electrochromic property.
Electrochromism Magnetron sputtering Tantalum oxide
Chien-Cheng Liu Kuang-(I) Liu Hao-Tung Lin Jow-Lay Huang
Department of Mechanical Engineering,Kun Shan University,Tainan,Taiwan Department of materials science and engineering,National Tsing Hua University,Taiwan Department of materials science and engineering,National Cheng Kung University,Taiwan
国际会议
The Seventh China International Conference on High-Performance Ceramics (第七届先进陶瓷国际研讨会(CICC-7))
厦门
英文
1604-1608
2011-11-04（万方平台首次上网日期，不代表论文的发表时间）