APPLICATION OF WAVELET TRANSFORM IN OPTICAL THIN FILM DEFECT AUTOMATIC INSPECTION SYSTEM

摘要：

　　This paper applied digital image processing technology to the defect inspection of optical thin film products.It first used wavelet transform on the image for two times to reduce the size.Then the edge of the defect would be found out through the screening of the isotropic results after 45 degrees and 90 degrees increment of Laplace operator,and then used the statistic threshold method to separate the defect image,and in the end used Hough transform to distinguish the defect The experimental result showed that it could test all the flaws on the 100 sheets of images,and successfully distinguished the spot defect and line defect,the distinguish rate is 96%,and it only cost 0.9 sec to detect a sheet Therefore it has clear that this paper has successfully developed a set of real time defect inspection system applicable to the optical thin film.

关键词： Optical thin film Wavelet transform Laplace operator Hough transform Defect inspection system

作者: CHUNG-FENG JEFFREY KUO CHIN-HSUN CHIU KAI-CHING PENG

作者单位: G-raduate Institute of Automation and Control, National Taiwan University of Science and Technology, Department of Materials Science and Engineering, National Taiwan University of Science and Technolog

会议类型: 国际会议

会议名称: 2011 International Conference on Wavelet Analysis and Pattern Recognition(2011小波分析与模式识别国际会议)

会议地点: 桂林

会议语种:英文

页码: 230-233

在线出版日期: 2011-07-10（万方平台首次上网日期，不代表论文的发表时间）