Grating Nanomeasurement and Implementation Technology Based on TMS320F28335

摘要：

　　A grating nanomeasurement device based on TMS320F28335 was presented,a novel subdivision algorithm for nanomeasurement was put forward and implemented in TMS320F28335.The analysis and test show that,through the pre-amplifying circuit well designed and through the data process algorithm optimized,the device applied with 20μrm pitch grating can realize ±2nm resolution and greater than 200mm/s measurement speed.The experimental results of nanopositioning also demonstrate that the grating nanomeasurement device developed by the paper can be taken as nanomeasurement equipment used in nano-CMM and nanopositioning system.

关键词： TMS320F28335 Grating Subdivision algorithm Nanomeasurement

作者: Congyu Xu

作者单位: School of Instrument Science and Opto-electronic Engineering, Hefei University of Technology Hefei 230009,Anhui,China

会议类型: 国际会议

会议名称: the 2010 International Conference on Frontiers of Manufacturing and Design Science(第一届制造与设计科学国际会议(ICFMD 2010))

会议地点: 重庆

会议语种:英文

页码: 1168-1172

在线出版日期: 2010-12-11（万方平台首次上网日期，不代表论文的发表时间）