Weighted cost rate-based heuristic scheduling method for semiconductor furnaces

摘要：

　　In semiconductor wafer manufacturing,furnaces are mainly used for diffusion and deposition operations.During operations,wherever a furnace becomes available,scheduling the next batch deals with decisions on a batch which operation to process next and how many wafer lots to group the batch.To resolve the mentioned scheduling problem of the furnace where existing multi-products and different due dates,a heuristic dynamic scheduling algorithm called WCRHA (weighted cost rate heuristic algorithm) is presented to minimize the objective value of the waiting cost per unit time based on due date constraints.Simulation results show that the proposed algorithm is valid and feasible.Compared with the previous dynamic scheduling algorithms,it is more efficient in ensuring delivery and reducing completion time.

关键词： Batch-processing Heuristic scheduling semiconductor furnaces Weighted cost rate

作者: Zhiqiang Lu Binghai Zhou

作者单位: School of Mechanical Engineering, Shanghai Jiaotong University, Shanghai, 200240, PR China School of Mechanical Engineering, Tongji University, Shanghai 201804, PR China

会议类型: 国际会议

会议名称: the 2010 International Conference on Frontiers of Manufacturing and Design Science(第一届制造与设计科学国际会议(ICFMD 2010))

会议地点: 重庆

会议语种:英文

页码: 2186-2190

在线出版日期: 2010-12-11（万方平台首次上网日期，不代表论文的发表时间）