Influence of Target Current on the Structure of Ti-Doped DLC Films
Ti-doped DLC films were synthesized from C2H2 and Ti by ion beam deposition and magnetron sputtering,and the influence of Ti target current on the structures and the friction coefficients of Ti-doped DLC films were studied by SEM,AES,XPS,a ball-on-disk friction tester.The Ti content in Ti-doped DLC films is below lat% when Ti target currents rise up to 3.5 A; but when Ti target current exceeds 3.5 A,Ti content in the films is obviously increased with increasing Ti target current.Ti-doped DLC films have a smooth dense surface with several particles dispersed in it and the surface morphology deposited with different Ti target currents is similar.With the augment of Ti target current,the ratio of sp3-C to sp2-C is almost a constant first,and then an obvious rise followed by an abrupt decrease is found;but only when Ti target current is above 5A,the ratio of TiC-C to sp2-C is obviously increased with Ti target current.The lowest friction coefficients are obtained for the Ti-doped DLC films with the highest ratio of sp3-C to sp2-C and a low ratio of TiC-C to sp2-C.
Ti-doped DLC films Ti target current ion beam deposition magnetron sputtering
Wang Cheng-biao Fu Zhi-qiang Yue Wen Peng Zhi-jian Yu Xiang Lin Song-sheng Dai Ming-jiang
School of Engineering and Technology, China University of Geosciences, Beijing 100083, China Guangzhou Research Institute of Non-ferrous Metals, Guangzhou 510651, China
国际会议
The Sixth China International Conference on High-Performance Ceramics(第六届中国先进陶瓷国际研讨会(CICC-6))
哈尔滨
英文
451-454
2009-08-16（万方平台首次上网日期，不代表论文的发表时间）