ZrO2 Thin Films Prepared by Self-Assembled Method

摘要：

　　Octadecyltrichlorosilane (OTS) was prepared on glass substrate to form self-assembled monolayer (OTS-SAM).The OTS-SAM was then UV-irradiated to endow the film with good chemisorption ability.Zirconia films were formed on silanol SAM by the LPD method.The phase structure and surface configuration of the zirconia films were studied by XRD and SEM respectively.The XRD results indicate that the as-deposited ZrO2 thin films are pure tetragonal phase after being annealed at 500 ℃ for 1 h.SEM images show the zirconia film is uniform,but not very compacted.

关键词： ZrO2 film Self-assembled Octadecyltrichlorosilane

作者: Xia Ao Tan Guoqiang Miao Hongyan Song Yayu Bo Haiyang

作者单位: Shannxi University of Science and Technology, Xian 710012, China

会议类型: 国际会议

会议名称: The Sixth China International Conference on High-Performance Ceramics(第六届中国先进陶瓷国际研讨会(CICC-6))

会议地点: 哈尔滨

会议语种:英文

页码: 485-487

在线出版日期: 2009-08-16（万方平台首次上网日期，不代表论文的发表时间）