Tribological behaviors of W-doped DLC films
W-doped DLC films were synthesized from CH4 and W by ion beam deposition and magnetron sputtering,and the influence of W target current on the surface morphology and the mechanical properties of W-doped DLC films deposited were studied.The W-doped DLC films in the study have a smooth dense surface with several particles of about 2micron.The hardness,the modulus,and the film-substrate adhesion of the films are increased with the rise of W target current and the critical load of the scratch test for all the W-doped DLC films is above 70N.The friction coefficient of W-doped DLC films is increased with the increase of W target current while the lowest wear rate is obtained when W target current is 1A.
W-doped DLC films ion beam deposition magnetron sputtering
Fu Zhi-qiang Wang Cheng-biao Du Xiu-iun Peng Zhi-iian Yu Xiang Lin Song-sheng Dai Ming-jiang
School of Engineering and Technology, China University of Geosciences, Beijing 100083, China Guangzhou Research Institute of Non-ferrous Metals, Guangzhou 510651, China
国际会议
The Sixth China International Conference on High-Performance Ceramics(第六届中国先进陶瓷国际研讨会(CICC-6))
哈尔滨
英文
474-476
2009-08-16（万方平台首次上网日期，不代表论文的发表时间）