W-doped DLC Films by IBD and MS
W-doped DLC films were synthesized from ethyne and tungsten by ion beam deposition and magnetron sputtering,and the influence of W target current on the structures and the properties of W-doped DLC films were studied.There exist some defects smaller than 3micron in W-doped DLC films and the influence of W target current on the defects is unobvious.The W content in the films is tardily increased with W target current below 3.5A,and then acutely rises with W target current.When target current is below 3.5A,the ratio of sp3-C to sp2-C is first decreased and then increased with the rise of target current,and the ratio of WC-C to sp2-C is close to 0; but when the target is above 3.5A,the ratio of sp3-C to sp2-C is decreased and the ratio of WC-C to sp2-C is augmented with further increasing target current.The hardness and the modulus is first decreased with target current and the minimum value is reached for the W-doped DLC films deposited with a target current of 2.6A.The W-doped DLC films deposited with a target current of 2.6A exhibit the best film-substrate adhesion.The W-doped DLC films deposited with a low target current exhibit a friction coefficient while the wear resistance of the W-doped DLC films deposited with a medium target current of 2.6A is best.
W-doped DLC films ion beam deposition magnetron sputtering
Fu Zhi-qiang Wang Cheng-biao Wang Wei Peng Zhi-jian Yu Xiang Lin Song-sheng Dai Mingjiang
School of Engineering and Technology, China University of Geosciences, Beijing 100083, China Guangzhou Research Institute of Non-ferrous Metals, Guangzhou 510651, China
国际会议
The Sixth China International Conference on High-Performance Ceramics(第六届中国先进陶瓷国际研讨会(CICC-6))
哈尔滨
英文
477-480
2009-08-16（万方平台首次上网日期，不代表论文的发表时间）