W Gradedly-doped Diamond-like Carbon Thin Films

摘要：

　　W gradedly-doped diamond-like carbon films were deposited on silicon and stainless steel by a hybrid technique combining ion beam deposition with magnetron sputtering.The structure,mechanical performance,friction coefficient,and wear loss were investigated.With increasing W target current applied,the structure of the as-prepared films changed from amorphous DLC to a composite of metal-containing DLC and metal carbides; the content of sp3 structure decreased from 31.26% to 22.3%;the nanohardness increased from 12 GPa to 28 GPa; the elastic modulus increased from 170 GPa to 310 GPa; and the critical loads were in the range of 80~100 N.The comprehensive tribological property of the as-prepared samples was improved after W doping.

关键词： Diamond-like carbon Thin film Tribological properties

作者: Chengbiao Wang Zhijian Peng Sudong Wu Zhiqiang Fu Xinchun Chen

作者单位: School of Engineering and Technology, China University of Geosciences, Beijing 100083, China

会议类型: 国际会议

会议名称: The Sixth China International Conference on High-Performance Ceramics(第六届中国先进陶瓷国际研讨会(CICC-6))

会议地点: 哈尔滨

会议语种:英文

页码: 739-742

在线出版日期: 2009-08-16（万方平台首次上网日期，不代表论文的发表时间）